MEMS High-Precision Closed-Loop Accelerometer

  • Adopts closed loop scheme for MEMS accelerometers
  • High precision better than 0.5μg (evaluated by Allan variance @10s)
  • Widely used in high precision inclination, vibration measurement and control applications
ParameterModel SA-03B (Low Range)Model SA-15B (High Range)
Measurement Range± 3g (±5g max)± 15g (±25g max)
Bias Instability (@25°C±2°C, Allan variance)≤ 0.5μg≤ 3μg
Bias Temperature Coefficient (-45°C ~ +75°C)±10μg/°C±30μg/°C
Bias Repeatability20μg100μg
Total Bias≤ 3mg≤ 10mg
Scale Factor Error (RMS)≤ 300 ppm
Scale Factor Temperature Coefficient≤ 0.1%
Axis Misalignment (RMS)≤ 1 mrad
Bandwidth200 Hz (-3dB, phase < -40°)
Warm-Up Time< 10s (quick start: 200ms ready)
Self-Test (ST)±5%
Weight750g
Dimensions50 × 50 × 50 mm
Supply Voltage±9 ~ ±15V
Power Consumption≤ 1W
InterfaceRS‑422 differential serial (UART or HDLC protocol)
Data Update Rate50Hz ~ 1000Hz
Built‑In Test (BIT)Power‑on self test, continuous self test
Random Vibration (Operating)4.12g RMS
Random Vibration (Non‑operating)5.8g RMS
Shock (Operating)150g / 11ms half‑sine
Temperature Range (Operating)-45°C ~ +75°C
Temperature Range (Storage)-55°C ~ +85°C

Scroll to Top
✉